Principal Investigator
qingkun liu
associate professor
Postdoctoral Researchers
Jiaqi Song
Chip packaging
Electrochemical synthesis
Electrochemical synthesis
Ph.D. Students
Chengpei Zhang
Microactuators
Advanced Packaging
Advanced Packaging
Zihe Liang
Electric micro-robotic system
closed loop force control
closed loop force control
Kaiyue Han
electrochemical microsensor
intelligent microrobot
intelligent microrobot
rongyu wang
Film&OCD
Metrology System
Metrology System
Master Students
Ning Wang
Multi-functional micro
manipulation robot
manipulation robot
Jingxian Lin
micro-stacked actuator
Heterogeneous integration
Heterogeneous integration
Research Administrative
Fushun Wang
hydrogel
lithography
lithography